Scanning electron microscopy Equipment: FEI XL30 Sirion FEG with Secondary Electron, Backscatter Electron and Cathodoluminescence detector, OIM Electron Backscatter Diffraction system, EDAX Energy Dispersive Spectrometer. Responsible person: B. Grobéty, C. Neururer Introduction course (ppt 3.5mb) System description (pdf 68kb) Examples Morphology EDS EBSD